| Abstract |
| The escalating demand for ultrapure water (UPW) in semiconductor manufacturing, particularly for wafer cleaning, necessitates stringent purification processes to eliminate impurities from raw water. Among these processes, membrane degassers (MDGs) play a crucial role in removing dissolved oxygen (DO). Comprising hollow fiber membranes and housings, MDGs use vacuum or sweep gas to effectively eliminate dissolved gases from the influent flowing on the shell and lumen sides. Despite the significance of MDG performance, standardized test methods for evaluation are currently absent. In this study, we propose performance evaluation factors, focusing on DO removal, to address this gap. Key factors affecting performance include DO removal rates and capacity, whereas indirect factors such as recovery and elution impact both setup and ongoing costs. To validate our proposed test methods and factors, we established a testing plant and conducted experiments on a set of MDGs. Testing our MDG in a pilot plant revealed no membrane failures or fouling, with consistent DO removal rates ranging from 94.6% to 95.7%, even with fluctuating influent DO levels from 20 ppm to 9,300 ppm. These results contribute to the establishment of standardized MDG tests, facilitating device comparison and enhancing overall efficiency in industrial ultrapure water (UPW) processes. |
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| Key Words |
| Dissolved Oxygen, Industrial Ultrapure, Membrane Degasser, Performance Evaluation, 용존산소, 고순도 공업용수, MDG, 성능평가방법 |
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