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DOI : 10.17640/KSWST.2015.23.5.81 , Vol.23, No.5, 81 ~ 89, 2015
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| Title |
| Process Development for Fluorine Removal of Scrubber Circulating Water |
| 심재훈 Jaehoon Shim , 김진수 Jinsu Kim , 이한슬 Hanseul Lee , 강민구 Minkoo Kang , 문기학 Kihak Moon , 이상철 Sangcheol Lee , 이상일 Sangill Lee |
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| Abstract |
| In the process using a variety of hazardous chemicals such as semiconductor or LCD process, hydrochloric acid, hydrofluoric acid, such as harmful chemicals have been discharged into the exhaust gas. In general, in order to remove these exhaust gases, used a scrubber unit at the last stage. The wet scrubber of the scrubber units is makes a droplet through the nozzle by applying pressure to the liquid and the droplets are contacted at suspended gas flow so that suspended dust are collected, and is a device that can also be removed at the same time toxic gases. The wastewater from the wet scrubber in semiconductor process is not only harmful chemicals in the course of recycling, the fluorine compounds are highly concentrated. These fluorine compounds have devised a scrubber wastewater treatment by coagulation and filtration process using alum because it can adversely affect the human health. 94.5% of the fluoride was removed from the coagulation process, ecological toxicity was reduced to zero, the turbidity was removed by filtration to 99.4%. |
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| Key Words |
| wet scrubber, scrubber wastewater, scrubber circulation water, fluorine, fluorine removal |
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